12/7/2012	8:00:05 AM	Helium valve closed
12/7/2012	8:00:05 AM	H2 valve closed
12/7/2012	8:00:05 AM	BCl3 valve closed
12/7/2012	8:00:05 AM	PH3 valve closed
12/7/2012	8:00:05 AM	SiCl4 pre valve closed
12/7/2012	8:00:05 AM	SiCl4 post valve closed
12/7/2012	8:00:05 AM	Main Vac valve closed
12/7/2012	8:00:05 AM	Bypass valve closed
12/7/2012	8:00:05 AM	Bubbler valve closed
12/7/2012	8:00:05 AM	Helium MFC set to  0.000000
12/7/2012	8:00:05 AM	H2 MFC set to  0.000000
12/7/2012	8:00:05 AM	BCl3 MFC set to  0.000000
12/7/2012	8:00:05 AM	PH3 MFC set to  0.000000
12/7/2012	8:00:05 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:00:05 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:00:05 AM	Tube furnace set to 0
12/7/2012	8:00:08 AM	Helium valve closed
12/7/2012	8:00:08 AM	BCl3 valve closed
12/7/2012	8:00:08 AM	PH3 valve closed
12/7/2012	8:00:08 AM	SiCl4 pre valve closed
12/7/2012	8:00:08 AM	SiCl4 post valve closed
12/7/2012	8:00:08 AM	Main Vac valve closed
12/7/2012	8:00:08 AM	Bypass valve closed
12/7/2012	8:00:08 AM	Bubbler valve closed
12/7/2012	8:00:08 AM	H2 valve opened
12/7/2012	8:00:08 AM	Helium MFC set to  0.000000
12/7/2012	8:00:08 AM	H2 MFC set to  500.000000
12/7/2012	8:00:08 AM	BCl3 MFC set to  0.000000
12/7/2012	8:00:08 AM	PH3 MFC set to  0.000000
12/7/2012	8:00:08 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:00:08 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:00:08 AM	Tube furnace set to 0
12/7/2012	8:01:21 AM	Helium valve closed
12/7/2012	8:01:21 AM	BCl3 valve closed
12/7/2012	8:01:21 AM	PH3 valve closed
12/7/2012	8:01:21 AM	SiCl4 pre valve closed
12/7/2012	8:01:21 AM	SiCl4 post valve closed
12/7/2012	8:01:21 AM	Main Vac valve closed
12/7/2012	8:01:21 AM	Bypass valve closed
12/7/2012	8:01:21 AM	H2 valve opened
12/7/2012	8:01:21 AM	Bubbler valve opened
12/7/2012	8:01:21 AM	Helium MFC set to  0.000000
12/7/2012	8:01:21 AM	H2 MFC set to  500.000000
12/7/2012	8:01:21 AM	BCl3 MFC set to  0.000000
12/7/2012	8:01:21 AM	PH3 MFC set to  0.000000
12/7/2012	8:01:21 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:01:21 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:01:21 AM	Tube furnace set to 0
12/7/2012	8:01:22 AM	Helium valve closed
12/7/2012	8:01:22 AM	BCl3 valve closed
12/7/2012	8:01:22 AM	PH3 valve closed
12/7/2012	8:01:22 AM	SiCl4 pre valve closed
12/7/2012	8:01:22 AM	SiCl4 post valve closed
12/7/2012	8:01:22 AM	Main Vac valve closed
12/7/2012	8:01:22 AM	Bypass valve closed
12/7/2012	8:01:22 AM	H2 valve opened
12/7/2012	8:01:22 AM	Bubbler valve opened
12/7/2012	8:01:22 AM	Helium MFC set to  0.000000
12/7/2012	8:01:22 AM	H2 MFC set to  500.000000
12/7/2012	8:01:22 AM	BCl3 MFC set to  0.000000
12/7/2012	8:01:22 AM	PH3 MFC set to  0.000000
12/7/2012	8:01:22 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:01:22 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:01:22 AM	Tube furnace set to 1000
12/7/2012	8:21:22 AM	Helium valve closed
12/7/2012	8:21:22 AM	PH3 valve closed
12/7/2012	8:21:22 AM	Main Vac valve closed
12/7/2012	8:21:22 AM	Bypass valve closed
12/7/2012	8:21:22 AM	H2 valve opened
12/7/2012	8:21:22 AM	BCl3 valve opened
12/7/2012	8:21:22 AM	SiCl4 pre valve opened
12/7/2012	8:21:22 AM	SiCl4 post valve opened
12/7/2012	8:21:22 AM	Bubbler valve opened
12/7/2012	8:21:22 AM	Helium MFC set to  0.000000
12/7/2012	8:21:22 AM	H2 MFC set to  450.000000
12/7/2012	8:21:22 AM	BCl3 MFC set to  1.300000
12/7/2012	8:21:22 AM	PH3 MFC set to  0.000000
12/7/2012	8:21:22 AM	SiCl4 MFC set to  50.000000
12/7/2012	8:21:22 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:21:22 AM	Tube furnace set to 1000
12/7/2012	8:39:22 AM	Helium valve closed
12/7/2012	8:39:22 AM	BCl3 valve closed
12/7/2012	8:39:22 AM	Main Vac valve closed
12/7/2012	8:39:22 AM	Bypass valve closed
12/7/2012	8:39:22 AM	H2 valve opened
12/7/2012	8:39:22 AM	PH3 valve opened
12/7/2012	8:39:22 AM	SiCl4 pre valve opened
12/7/2012	8:39:22 AM	SiCl4 post valve opened
12/7/2012	8:39:22 AM	Bubbler valve opened
12/7/2012	8:39:22 AM	Helium MFC set to  0.000000
12/7/2012	8:39:22 AM	H2 MFC set to  450.000000
12/7/2012	8:39:22 AM	BCl3 MFC set to  0.000000
12/7/2012	8:39:22 AM	PH3 MFC set to  20.000000
12/7/2012	8:39:22 AM	SiCl4 MFC set to  50.000000
12/7/2012	8:39:22 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:39:22 AM	Tube furnace set to 1000
12/7/2012	8:45:22 AM	Helium valve closed
12/7/2012	8:45:22 AM	BCl3 valve closed
12/7/2012	8:45:22 AM	PH3 valve closed
12/7/2012	8:45:22 AM	SiCl4 pre valve closed
12/7/2012	8:45:22 AM	SiCl4 post valve closed
12/7/2012	8:45:22 AM	Main Vac valve closed
12/7/2012	8:45:22 AM	Bypass valve closed
12/7/2012	8:45:22 AM	H2 valve opened
12/7/2012	8:45:22 AM	Bubbler valve opened
12/7/2012	8:45:22 AM	Helium MFC set to  0.000000
12/7/2012	8:45:22 AM	H2 MFC set to  500.000000
12/7/2012	8:45:22 AM	BCl3 MFC set to  0.000000
12/7/2012	8:45:22 AM	PH3 MFC set to  0.000000
12/7/2012	8:45:22 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:45:22 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:45:23 AM	Tube furnace set to 950
12/7/2012	8:48:23 AM	Helium valve closed
12/7/2012	8:48:23 AM	BCl3 valve closed
12/7/2012	8:48:23 AM	PH3 valve closed
12/7/2012	8:48:23 AM	SiCl4 pre valve closed
12/7/2012	8:48:23 AM	SiCl4 post valve closed
12/7/2012	8:48:23 AM	Main Vac valve closed
12/7/2012	8:48:23 AM	Bypass valve closed
12/7/2012	8:48:23 AM	H2 valve opened
12/7/2012	8:48:23 AM	Bubbler valve opened
12/7/2012	8:48:23 AM	Helium MFC set to  0.000000
12/7/2012	8:48:23 AM	H2 MFC set to  500.000000
12/7/2012	8:48:23 AM	BCl3 MFC set to  0.000000
12/7/2012	8:48:23 AM	PH3 MFC set to  0.000000
12/7/2012	8:48:23 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:48:23 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:48:23 AM	Tube furnace set to 900
12/7/2012	8:51:23 AM	Helium valve closed
12/7/2012	8:51:23 AM	BCl3 valve closed
12/7/2012	8:51:23 AM	PH3 valve closed
12/7/2012	8:51:23 AM	SiCl4 pre valve closed
12/7/2012	8:51:23 AM	SiCl4 post valve closed
12/7/2012	8:51:23 AM	Main Vac valve closed
12/7/2012	8:51:23 AM	Bypass valve closed
12/7/2012	8:51:23 AM	H2 valve opened
12/7/2012	8:51:23 AM	Bubbler valve opened
12/7/2012	8:51:23 AM	Helium MFC set to  0.000000
12/7/2012	8:51:23 AM	H2 MFC set to  500.000000
12/7/2012	8:51:23 AM	BCl3 MFC set to  0.000000
12/7/2012	8:51:23 AM	PH3 MFC set to  0.000000
12/7/2012	8:51:23 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:51:23 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:51:23 AM	Tube furnace set to 850
12/7/2012	8:54:23 AM	Helium valve closed
12/7/2012	8:54:23 AM	BCl3 valve closed
12/7/2012	8:54:23 AM	PH3 valve closed
12/7/2012	8:54:23 AM	SiCl4 pre valve closed
12/7/2012	8:54:23 AM	SiCl4 post valve closed
12/7/2012	8:54:23 AM	Main Vac valve closed
12/7/2012	8:54:23 AM	Bypass valve closed
12/7/2012	8:54:23 AM	H2 valve opened
12/7/2012	8:54:23 AM	Bubbler valve opened
12/7/2012	8:54:23 AM	Helium MFC set to  0.000000
12/7/2012	8:54:23 AM	H2 MFC set to  500.000000
12/7/2012	8:54:23 AM	BCl3 MFC set to  0.000000
12/7/2012	8:54:23 AM	PH3 MFC set to  0.000000
12/7/2012	8:54:23 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:54:23 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:54:23 AM	Tube furnace set to 800
12/7/2012	8:57:23 AM	Helium valve closed
12/7/2012	8:57:23 AM	BCl3 valve closed
12/7/2012	8:57:23 AM	PH3 valve closed
12/7/2012	8:57:23 AM	SiCl4 pre valve closed
12/7/2012	8:57:23 AM	SiCl4 post valve closed
12/7/2012	8:57:23 AM	Main Vac valve closed
12/7/2012	8:57:23 AM	Bypass valve closed
12/7/2012	8:57:23 AM	H2 valve opened
12/7/2012	8:57:23 AM	Bubbler valve opened
12/7/2012	8:57:23 AM	Helium MFC set to  0.000000
12/7/2012	8:57:23 AM	H2 MFC set to  500.000000
12/7/2012	8:57:23 AM	BCl3 MFC set to  0.000000
12/7/2012	8:57:23 AM	PH3 MFC set to  0.000000
12/7/2012	8:57:23 AM	SiCl4 MFC set to  0.000000
12/7/2012	8:57:23 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	8:57:23 AM	Tube furnace set to 750
12/7/2012	9:00:23 AM	H2 valve closed
12/7/2012	9:00:23 AM	BCl3 valve closed
12/7/2012	9:00:23 AM	PH3 valve closed
12/7/2012	9:00:23 AM	SiCl4 pre valve closed
12/7/2012	9:00:23 AM	SiCl4 post valve closed
12/7/2012	9:00:23 AM	Main Vac valve closed
12/7/2012	9:00:23 AM	Bypass valve closed
12/7/2012	9:00:23 AM	Helium valve opened
12/7/2012	9:00:23 AM	Bubbler valve opened
12/7/2012	9:00:23 AM	Helium MFC set to  500.000000
12/7/2012	9:00:23 AM	H2 MFC set to  0.000000
12/7/2012	9:00:23 AM	BCl3 MFC set to  0.000000
12/7/2012	9:00:23 AM	PH3 MFC set to  0.000000
12/7/2012	9:00:23 AM	SiCl4 MFC set to  0.000000
12/7/2012	9:00:23 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	9:00:24 AM	Tube furnace set to 0
12/7/2012	9:20:24 AM	Helium valve closed
12/7/2012	9:20:24 AM	H2 valve closed
12/7/2012	9:20:24 AM	BCl3 valve closed
12/7/2012	9:20:24 AM	PH3 valve closed
12/7/2012	9:20:24 AM	SiCl4 pre valve closed
12/7/2012	9:20:24 AM	SiCl4 post valve closed
12/7/2012	9:20:24 AM	Main Vac valve closed
12/7/2012	9:20:24 AM	Bypass valve closed
12/7/2012	9:20:24 AM	Bubbler valve closed
12/7/2012	9:20:24 AM	Helium MFC set to  0.000000
12/7/2012	9:20:24 AM	H2 MFC set to  0.000000
12/7/2012	9:20:24 AM	BCl3 MFC set to  0.000000
12/7/2012	9:20:24 AM	PH3 MFC set to  0.000000
12/7/2012	9:20:24 AM	SiCl4 MFC set to  0.000000
12/7/2012	9:20:24 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	9:20:24 AM	Tube furnace set to 0
12/7/2012	9:50:24 AM	Helium valve closed
12/7/2012	9:50:24 AM	H2 valve closed
12/7/2012	9:50:24 AM	BCl3 valve closed
12/7/2012	9:50:24 AM	PH3 valve closed
12/7/2012	9:50:24 AM	SiCl4 pre valve closed
12/7/2012	9:50:24 AM	SiCl4 post valve closed
12/7/2012	9:50:24 AM	Main Vac valve closed
12/7/2012	9:50:24 AM	Bubbler valve closed
12/7/2012	9:50:24 AM	Bypass valve opened
12/7/2012	9:50:24 AM	Helium MFC set to  0.000000
12/7/2012	9:50:24 AM	H2 MFC set to  0.000000
12/7/2012	9:50:24 AM	BCl3 MFC set to  0.000000
12/7/2012	9:50:24 AM	PH3 MFC set to  0.000000
12/7/2012	9:50:24 AM	SiCl4 MFC set to  0.000000
12/7/2012	9:50:24 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	9:50:24 AM	Tube furnace set to 0
12/7/2012	9:51:26 AM	Helium valve closed
12/7/2012	9:51:26 AM	H2 valve closed
12/7/2012	9:51:26 AM	BCl3 valve closed
12/7/2012	9:51:26 AM	PH3 valve closed
12/7/2012	9:51:26 AM	SiCl4 pre valve closed
12/7/2012	9:51:26 AM	SiCl4 post valve closed
12/7/2012	9:51:26 AM	Main Vac valve closed
12/7/2012	9:51:26 AM	Bubbler valve closed
12/7/2012	9:51:26 AM	Bypass valve opened
12/7/2012	9:51:26 AM	Helium MFC set to  0.000000
12/7/2012	9:51:26 AM	H2 MFC set to  0.000000
12/7/2012	9:51:26 AM	BCl3 MFC set to  0.000000
12/7/2012	9:51:26 AM	PH3 MFC set to  0.000000
12/7/2012	9:51:26 AM	SiCl4 MFC set to  0.000000
12/7/2012	9:51:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	9:51:26 AM	Tube furnace set to 0
12/7/2012	9:52:26 AM	Helium valve closed
12/7/2012	9:52:26 AM	H2 valve closed
12/7/2012	9:52:26 AM	BCl3 valve closed
12/7/2012	9:52:26 AM	PH3 valve closed
12/7/2012	9:52:26 AM	SiCl4 pre valve closed
12/7/2012	9:52:26 AM	SiCl4 post valve closed
12/7/2012	9:52:26 AM	Bypass valve closed
12/7/2012	9:52:26 AM	Bubbler valve closed
12/7/2012	9:52:26 AM	Main Vac valve opened
12/7/2012	9:52:26 AM	Helium MFC set to  0.000000
12/7/2012	9:52:26 AM	H2 MFC set to  0.000000
12/7/2012	9:52:26 AM	BCl3 MFC set to  0.000000
12/7/2012	9:52:26 AM	PH3 MFC set to  0.000000
12/7/2012	9:52:26 AM	SiCl4 MFC set to  0.000000
12/7/2012	9:52:26 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	9:52:26 AM	Tube furnace set to 0
12/7/2012	9:52:27 AM	Run finished at 9:52 AM
12/7/2012	10:09:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	10:09:34 AM	Recipe started at 10:09 AM
12/7/2012	10:09:34 AM	Helium valve closed
12/7/2012	10:09:34 AM	H2 valve closed
12/7/2012	10:09:34 AM	BCl3 valve closed
12/7/2012	10:09:34 AM	PH3 valve closed
12/7/2012	10:09:34 AM	SiCl4 pre valve closed
12/7/2012	10:09:34 AM	SiCl4 post valve closed
12/7/2012	10:09:34 AM	Main Vac valve closed
12/7/2012	10:09:34 AM	Bypass valve closed
12/7/2012	10:09:34 AM	Bubbler valve closed
12/7/2012	10:09:34 AM	Helium MFC set to  0.000000
12/7/2012	10:09:34 AM	H2 MFC set to  0.000000
12/7/2012	10:09:34 AM	BCl3 MFC set to  0.000000
12/7/2012	10:09:34 AM	PH3 MFC set to  0.000000
12/7/2012	10:09:34 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:09:34 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:09:34 AM	Tube furnace set to 0
12/7/2012	10:09:37 AM	H2 valve closed
12/7/2012	10:09:37 AM	BCl3 valve closed
12/7/2012	10:09:37 AM	PH3 valve closed
12/7/2012	10:09:37 AM	SiCl4 pre valve closed
12/7/2012	10:09:37 AM	SiCl4 post valve closed
12/7/2012	10:09:37 AM	Main Vac valve closed
12/7/2012	10:09:37 AM	Bypass valve closed
12/7/2012	10:09:37 AM	Bubbler valve closed
12/7/2012	10:09:37 AM	Helium valve opened
12/7/2012	10:09:37 AM	Helium MFC set to  500.000000
12/7/2012	10:09:37 AM	H2 MFC set to  0.000000
12/7/2012	10:09:37 AM	BCl3 MFC set to  0.000000
12/7/2012	10:09:37 AM	PH3 MFC set to  0.000000
12/7/2012	10:09:37 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:09:37 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:09:37 AM	Tube furnace set to 0
12/7/2012	10:10:45 AM	Helium valve closed
12/7/2012	10:10:45 AM	H2 valve closed
12/7/2012	10:10:45 AM	BCl3 valve closed
12/7/2012	10:10:45 AM	PH3 valve closed
12/7/2012	10:10:45 AM	SiCl4 pre valve closed
12/7/2012	10:10:45 AM	SiCl4 post valve closed
12/7/2012	10:10:45 AM	Main Vac valve closed
12/7/2012	10:10:45 AM	Bypass valve closed
12/7/2012	10:10:45 AM	Bubbler valve closed
12/7/2012	10:10:45 AM	Helium MFC set to  0.000000
12/7/2012	10:10:45 AM	H2 MFC set to  0.000000
12/7/2012	10:10:45 AM	BCl3 MFC set to  0.000000
12/7/2012	10:10:45 AM	PH3 MFC set to  0.000000
12/7/2012	10:10:45 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:10:45 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:10:45 AM	Tube furnace set to 0
12/7/2012	10:10:46 AM	Run finished at 10:10 AM
12/7/2012	10:10:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	10:14:11 AM	Helium valve closed
12/7/2012	10:14:11 AM	H2 valve closed
12/7/2012	10:14:11 AM	BCl3 valve closed
12/7/2012	10:14:11 AM	PH3 valve closed
12/7/2012	10:14:11 AM	SiCl4 pre valve closed
12/7/2012	10:14:11 AM	SiCl4 post valve closed
12/7/2012	10:14:11 AM	Main Vac valve closed
12/7/2012	10:14:11 AM	Bypass valve closed
12/7/2012	10:14:11 AM	Bubbler valve closed
12/7/2012	10:14:11 AM	Helium MFC set to  0.000000
12/7/2012	10:14:11 AM	H2 MFC set to  0.000000
12/7/2012	10:14:11 AM	BCl3 MFC set to  0.000000
12/7/2012	10:14:11 AM	PH3 MFC set to  0.000000
12/7/2012	10:14:11 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:14:12 AM	Bypass solenoid MFC set to  760.000000
12/7/2012	10:14:12 AM	Tube furnace set to 0
12/7/2012	10:22:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	10:22:40 AM	Recipe started at 10:22 AM
12/7/2012	10:22:40 AM	Helium valve closed
12/7/2012	10:22:40 AM	H2 valve closed
12/7/2012	10:22:40 AM	BCl3 valve closed
12/7/2012	10:22:40 AM	PH3 valve closed
12/7/2012	10:22:40 AM	SiCl4 pre valve closed
12/7/2012	10:22:40 AM	SiCl4 post valve closed
12/7/2012	10:22:40 AM	Main Vac valve closed
12/7/2012	10:22:40 AM	Bubbler valve closed
12/7/2012	10:22:40 AM	Bypass valve opened
12/7/2012	10:22:40 AM	Helium MFC set to  0.000000
12/7/2012	10:22:40 AM	H2 MFC set to  0.000000
12/7/2012	10:22:40 AM	BCl3 MFC set to  0.000000
12/7/2012	10:22:40 AM	PH3 MFC set to  0.000000
12/7/2012	10:22:40 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:22:40 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:22:40 AM	Tube furnace set to 0
12/7/2012	10:24:07 AM	Helium valve closed
12/7/2012	10:24:07 AM	H2 valve closed
12/7/2012	10:24:08 AM	BCl3 valve closed
12/7/2012	10:24:08 AM	PH3 valve closed
12/7/2012	10:24:08 AM	SiCl4 pre valve closed
12/7/2012	10:24:08 AM	SiCl4 post valve closed
12/7/2012	10:24:08 AM	Main Vac valve closed
12/7/2012	10:24:08 AM	Bubbler valve closed
12/7/2012	10:24:08 AM	Bypass valve opened
12/7/2012	10:24:08 AM	Helium MFC set to  0.000000
12/7/2012	10:24:08 AM	H2 MFC set to  0.000000
12/7/2012	10:24:08 AM	BCl3 MFC set to  0.000000
12/7/2012	10:24:08 AM	PH3 MFC set to  0.000000
12/7/2012	10:24:08 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:24:08 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:24:08 AM	Tube furnace set to 0
12/7/2012	10:25:08 AM	Helium valve closed
12/7/2012	10:25:08 AM	H2 valve closed
12/7/2012	10:25:08 AM	BCl3 valve closed
12/7/2012	10:25:08 AM	PH3 valve closed
12/7/2012	10:25:08 AM	SiCl4 pre valve closed
12/7/2012	10:25:08 AM	SiCl4 post valve closed
12/7/2012	10:25:08 AM	Bypass valve closed
12/7/2012	10:25:08 AM	Bubbler valve closed
12/7/2012	10:25:08 AM	Main Vac valve opened
12/7/2012	10:25:08 AM	Helium MFC set to  0.000000
12/7/2012	10:25:08 AM	H2 MFC set to  0.000000
12/7/2012	10:25:08 AM	BCl3 MFC set to  0.000000
12/7/2012	10:25:08 AM	PH3 MFC set to  0.000000
12/7/2012	10:25:08 AM	SiCl4 MFC set to  0.000000
12/7/2012	10:25:08 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	10:25:08 AM	Tube furnace set to 0
12/7/2012	10:25:09 AM	Run finished at 10:25 AM
12/7/2012	10:25:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	10:25:31 AM	Tube furnace set to 150
12/7/2012	11:07:06 AM	Main Vac valve closed
12/7/2012	11:07:19 AM	Main Vac valve opened
12/7/2012	11:17:44 AM	Main Vac valve closed
12/7/2012	11:17:59 AM	Main Vac valve opened
12/7/2012	11:22:32 AM	Recipe started at 11:22 AM
12/7/2012	11:22:32 AM	Helium valve closed
12/7/2012	11:22:32 AM	H2 valve closed
12/7/2012	11:22:32 AM	BCl3 valve closed
12/7/2012	11:22:32 AM	PH3 valve closed
12/7/2012	11:22:32 AM	SiCl4 pre valve closed
12/7/2012	11:22:32 AM	SiCl4 post valve closed
12/7/2012	11:22:32 AM	Main Vac valve closed
12/7/2012	11:22:32 AM	Bypass valve closed
12/7/2012	11:22:32 AM	Bubbler valve closed
12/7/2012	11:22:32 AM	Helium MFC set to  0.000000
12/7/2012	11:22:32 AM	H2 MFC set to  0.000000
12/7/2012	11:22:32 AM	BCl3 MFC set to  0.000000
12/7/2012	11:22:32 AM	PH3 MFC set to  0.000000
12/7/2012	11:22:32 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:22:32 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:22:32 AM	Tube furnace set to 0
12/7/2012	11:22:35 AM	Helium valve closed
12/7/2012	11:22:35 AM	BCl3 valve closed
12/7/2012	11:22:35 AM	PH3 valve closed
12/7/2012	11:22:35 AM	SiCl4 pre valve closed
12/7/2012	11:22:35 AM	SiCl4 post valve closed
12/7/2012	11:22:35 AM	Main Vac valve closed
12/7/2012	11:22:35 AM	Bypass valve closed
12/7/2012	11:22:35 AM	Bubbler valve closed
12/7/2012	11:22:35 AM	H2 valve opened
12/7/2012	11:22:35 AM	Helium MFC set to  0.000000
12/7/2012	11:22:35 AM	H2 MFC set to  500.000000
12/7/2012	11:22:36 AM	BCl3 MFC set to  0.000000
12/7/2012	11:22:36 AM	PH3 MFC set to  0.000000
12/7/2012	11:22:36 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:22:36 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:22:36 AM	Tube furnace set to 0
12/7/2012	11:23:47 AM	Helium valve closed
12/7/2012	11:23:47 AM	BCl3 valve closed
12/7/2012	11:23:47 AM	PH3 valve closed
12/7/2012	11:23:47 AM	SiCl4 pre valve closed
12/7/2012	11:23:47 AM	SiCl4 post valve closed
12/7/2012	11:23:47 AM	Main Vac valve closed
12/7/2012	11:23:47 AM	Bypass valve closed
12/7/2012	11:23:47 AM	H2 valve opened
12/7/2012	11:23:47 AM	Bubbler valve opened
12/7/2012	11:23:47 AM	Helium MFC set to  0.000000
12/7/2012	11:23:47 AM	H2 MFC set to  500.000000
12/7/2012	11:23:47 AM	BCl3 MFC set to  0.000000
12/7/2012	11:23:47 AM	PH3 MFC set to  0.000000
12/7/2012	11:23:47 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:23:47 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:23:47 AM	Tube furnace set to 0
12/7/2012	11:23:48 AM	Helium valve closed
12/7/2012	11:23:48 AM	BCl3 valve closed
12/7/2012	11:23:48 AM	PH3 valve closed
12/7/2012	11:23:48 AM	SiCl4 pre valve closed
12/7/2012	11:23:48 AM	SiCl4 post valve closed
12/7/2012	11:23:48 AM	Main Vac valve closed
12/7/2012	11:23:48 AM	Bypass valve closed
12/7/2012	11:23:48 AM	H2 valve opened
12/7/2012	11:23:48 AM	Bubbler valve opened
12/7/2012	11:23:48 AM	Helium MFC set to  0.000000
12/7/2012	11:23:48 AM	H2 MFC set to  500.000000
12/7/2012	11:23:48 AM	BCl3 MFC set to  0.000000
12/7/2012	11:23:49 AM	PH3 MFC set to  0.000000
12/7/2012	11:23:49 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:23:49 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:23:49 AM	Tube furnace set to 1000
12/7/2012	11:25:33 AM	Run aborted at 11:25 AM
12/7/2012	11:25:33 AM	Helium valve closed
12/7/2012	11:25:33 AM	H2 valve closed
12/7/2012	11:25:33 AM	BCl3 valve closed
12/7/2012	11:25:33 AM	PH3 valve closed
12/7/2012	11:25:33 AM	SiCl4 pre valve closed
12/7/2012	11:25:33 AM	SiCl4 post valve closed
12/7/2012	11:25:33 AM	Bypass valve closed
12/7/2012	11:25:33 AM	Main Vac valve closed
12/7/2012	11:25:33 AM	Bubbler valve closed
12/7/2012	11:25:33 AM	Helium MFC set to  0.000000
12/7/2012	11:25:33 AM	H2 MFC set to  0.000000
12/7/2012	11:25:33 AM	BCl3 MFC set to  0.000000
12/7/2012	11:25:33 AM	PH3 MFC set to  0.000000
12/7/2012	11:25:33 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:25:33 AM	Tube furnace set to 0
12/7/2012	11:25:56 AM	Recipe started at 11:25 AM
12/7/2012	11:25:56 AM	Helium valve closed
12/7/2012	11:25:56 AM	H2 valve closed
12/7/2012	11:25:56 AM	BCl3 valve closed
12/7/2012	11:25:56 AM	PH3 valve closed
12/7/2012	11:25:56 AM	SiCl4 pre valve closed
12/7/2012	11:25:56 AM	SiCl4 post valve closed
12/7/2012	11:25:56 AM	Main Vac valve closed
12/7/2012	11:25:56 AM	Bypass valve closed
12/7/2012	11:25:56 AM	Bubbler valve closed
12/7/2012	11:25:56 AM	Helium MFC set to  0.000000
12/7/2012	11:25:56 AM	H2 MFC set to  0.000000
12/7/2012	11:25:56 AM	BCl3 MFC set to  0.000000
12/7/2012	11:25:56 AM	PH3 MFC set to  0.000000
12/7/2012	11:25:56 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:25:56 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:25:56 AM	Tube furnace set to 0
12/7/2012	11:25:59 AM	Helium valve closed
12/7/2012	11:25:59 AM	BCl3 valve closed
12/7/2012	11:25:59 AM	PH3 valve closed
12/7/2012	11:25:59 AM	SiCl4 pre valve closed
12/7/2012	11:25:59 AM	SiCl4 post valve closed
12/7/2012	11:25:59 AM	Main Vac valve closed
12/7/2012	11:25:59 AM	Bypass valve closed
12/7/2012	11:25:59 AM	Bubbler valve closed
12/7/2012	11:25:59 AM	H2 valve opened
12/7/2012	11:25:59 AM	Helium MFC set to  0.000000
12/7/2012	11:25:59 AM	H2 MFC set to  500.000000
12/7/2012	11:25:59 AM	BCl3 MFC set to  0.000000
12/7/2012	11:25:59 AM	PH3 MFC set to  0.000000
12/7/2012	11:25:59 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:25:59 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:26:00 AM	Tube furnace set to 0
12/7/2012	11:26:00 AM	Helium valve closed
12/7/2012	11:26:00 AM	BCl3 valve closed
12/7/2012	11:26:00 AM	PH3 valve closed
12/7/2012	11:26:00 AM	SiCl4 pre valve closed
12/7/2012	11:26:00 AM	SiCl4 post valve closed
12/7/2012	11:26:00 AM	Main Vac valve closed
12/7/2012	11:26:00 AM	Bypass valve closed
12/7/2012	11:26:00 AM	H2 valve opened
12/7/2012	11:26:00 AM	Bubbler valve opened
12/7/2012	11:26:00 AM	Helium MFC set to  0.000000
12/7/2012	11:26:00 AM	H2 MFC set to  500.000000
12/7/2012	11:26:00 AM	BCl3 MFC set to  0.000000
12/7/2012	11:26:00 AM	PH3 MFC set to  0.000000
12/7/2012	11:26:00 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:26:00 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:26:01 AM	Tube furnace set to 0
12/7/2012	11:26:02 AM	Helium valve closed
12/7/2012	11:26:02 AM	BCl3 valve closed
12/7/2012	11:26:02 AM	PH3 valve closed
12/7/2012	11:26:02 AM	SiCl4 pre valve closed
12/7/2012	11:26:02 AM	SiCl4 post valve closed
12/7/2012	11:26:02 AM	Main Vac valve closed
12/7/2012	11:26:02 AM	Bypass valve closed
12/7/2012	11:26:02 AM	H2 valve opened
12/7/2012	11:26:02 AM	Bubbler valve opened
12/7/2012	11:26:02 AM	Helium MFC set to  0.000000
12/7/2012	11:26:02 AM	H2 MFC set to  500.000000
12/7/2012	11:26:02 AM	BCl3 MFC set to  0.000000
12/7/2012	11:26:02 AM	PH3 MFC set to  0.000000
12/7/2012	11:26:02 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:26:02 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:26:02 AM	Tube furnace set to 1000
12/7/2012	11:36:02 AM	Helium valve closed
12/7/2012	11:36:02 AM	PH3 valve closed
12/7/2012	11:36:02 AM	Main Vac valve closed
12/7/2012	11:36:02 AM	Bypass valve closed
12/7/2012	11:36:02 AM	H2 valve opened
12/7/2012	11:36:02 AM	BCl3 valve opened
12/7/2012	11:36:02 AM	SiCl4 pre valve opened
12/7/2012	11:36:02 AM	SiCl4 post valve opened
12/7/2012	11:36:02 AM	Bubbler valve opened
12/7/2012	11:36:02 AM	Helium MFC set to  0.000000
12/7/2012	11:36:02 AM	H2 MFC set to  450.000000
12/7/2012	11:36:02 AM	BCl3 MFC set to  1.300000
12/7/2012	11:36:02 AM	PH3 MFC set to  0.000000
12/7/2012	11:36:02 AM	SiCl4 MFC set to  50.000000
12/7/2012	11:36:02 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:36:02 AM	Tube furnace set to 1000
12/7/2012	11:56:02 AM	Helium valve closed
12/7/2012	11:56:02 AM	BCl3 valve closed
12/7/2012	11:56:02 AM	PH3 valve closed
12/7/2012	11:56:02 AM	SiCl4 pre valve closed
12/7/2012	11:56:02 AM	SiCl4 post valve closed
12/7/2012	11:56:02 AM	Main Vac valve closed
12/7/2012	11:56:02 AM	Bypass valve closed
12/7/2012	11:56:02 AM	H2 valve opened
12/7/2012	11:56:02 AM	Bubbler valve opened
12/7/2012	11:56:02 AM	Helium MFC set to  0.000000
12/7/2012	11:56:02 AM	H2 MFC set to  500.000000
12/7/2012	11:56:02 AM	BCl3 MFC set to  0.000000
12/7/2012	11:56:02 AM	PH3 MFC set to  0.000000
12/7/2012	11:56:02 AM	SiCl4 MFC set to  0.000000
12/7/2012	11:56:02 AM	Bypass solenoid MFC set to  0.000000
12/7/2012	11:56:02 AM	Tube furnace set to 900
12/7/2012	12:01:02 PM	Helium valve closed
12/7/2012	12:01:02 PM	BCl3 valve closed
12/7/2012	12:01:02 PM	PH3 valve closed
12/7/2012	12:01:02 PM	SiCl4 pre valve closed
12/7/2012	12:01:02 PM	SiCl4 post valve closed
12/7/2012	12:01:02 PM	Main Vac valve closed
12/7/2012	12:01:02 PM	Bypass valve closed
12/7/2012	12:01:02 PM	H2 valve opened
12/7/2012	12:01:02 PM	Bubbler valve opened
12/7/2012	12:01:02 PM	Helium MFC set to  0.000000
12/7/2012	12:01:02 PM	H2 MFC set to  500.000000
12/7/2012	12:01:02 PM	BCl3 MFC set to  0.000000
12/7/2012	12:01:02 PM	PH3 MFC set to  0.000000
12/7/2012	12:01:02 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:01:02 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:01:02 PM	Tube furnace set to 800
12/7/2012	12:06:03 PM	Helium valve closed
12/7/2012	12:06:03 PM	BCl3 valve closed
12/7/2012	12:06:03 PM	PH3 valve closed
12/7/2012	12:06:03 PM	SiCl4 pre valve closed
12/7/2012	12:06:03 PM	SiCl4 post valve closed
12/7/2012	12:06:03 PM	Main Vac valve closed
12/7/2012	12:06:03 PM	Bypass valve closed
12/7/2012	12:06:03 PM	H2 valve opened
12/7/2012	12:06:03 PM	Bubbler valve opened
12/7/2012	12:06:03 PM	Helium MFC set to  0.000000
12/7/2012	12:06:03 PM	H2 MFC set to  500.000000
12/7/2012	12:06:03 PM	BCl3 MFC set to  0.000000
12/7/2012	12:06:03 PM	PH3 MFC set to  0.000000
12/7/2012	12:06:03 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:06:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:06:03 PM	Tube furnace set to 700
12/7/2012	12:11:03 PM	Helium valve closed
12/7/2012	12:11:03 PM	BCl3 valve closed
12/7/2012	12:11:03 PM	PH3 valve closed
12/7/2012	12:11:03 PM	SiCl4 pre valve closed
12/7/2012	12:11:03 PM	SiCl4 post valve closed
12/7/2012	12:11:03 PM	Main Vac valve closed
12/7/2012	12:11:03 PM	Bypass valve closed
12/7/2012	12:11:03 PM	H2 valve opened
12/7/2012	12:11:03 PM	Bubbler valve opened
12/7/2012	12:11:03 PM	Helium MFC set to  0.000000
12/7/2012	12:11:03 PM	H2 MFC set to  500.000000
12/7/2012	12:11:03 PM	BCl3 MFC set to  0.000000
12/7/2012	12:11:03 PM	PH3 MFC set to  0.000000
12/7/2012	12:11:03 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:11:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:11:03 PM	Tube furnace set to 600
12/7/2012	12:16:03 PM	H2 valve closed
12/7/2012	12:16:03 PM	BCl3 valve closed
12/7/2012	12:16:03 PM	PH3 valve closed
12/7/2012	12:16:03 PM	SiCl4 pre valve closed
12/7/2012	12:16:03 PM	SiCl4 post valve closed
12/7/2012	12:16:03 PM	Main Vac valve closed
12/7/2012	12:16:03 PM	Bypass valve closed
12/7/2012	12:16:03 PM	Helium valve opened
12/7/2012	12:16:03 PM	Bubbler valve opened
12/7/2012	12:16:03 PM	Helium MFC set to  500.000000
12/7/2012	12:16:03 PM	H2 MFC set to  0.000000
12/7/2012	12:16:03 PM	BCl3 MFC set to  0.000000
12/7/2012	12:16:03 PM	PH3 MFC set to  0.000000
12/7/2012	12:16:03 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:16:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:16:03 PM	Tube furnace set to 0
12/7/2012	12:36:03 PM	Helium valve closed
12/7/2012	12:36:03 PM	H2 valve closed
12/7/2012	12:36:03 PM	BCl3 valve closed
12/7/2012	12:36:03 PM	PH3 valve closed
12/7/2012	12:36:03 PM	SiCl4 pre valve closed
12/7/2012	12:36:03 PM	SiCl4 post valve closed
12/7/2012	12:36:03 PM	Main Vac valve closed
12/7/2012	12:36:03 PM	Bypass valve closed
12/7/2012	12:36:03 PM	Bubbler valve closed
12/7/2012	12:36:03 PM	Helium MFC set to  0.000000
12/7/2012	12:36:03 PM	H2 MFC set to  0.000000
12/7/2012	12:36:03 PM	BCl3 MFC set to  0.000000
12/7/2012	12:36:03 PM	PH3 MFC set to  0.000000
12/7/2012	12:36:03 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:36:03 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:36:03 PM	Tube furnace set to 0
12/7/2012	12:36:04 PM	Run finished at 12:36 PM
12/7/2012	12:51:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	12:51:11 PM	Recipe started at 12:51 PM
12/7/2012	12:51:11 PM	Helium valve closed
12/7/2012	12:51:11 PM	H2 valve closed
12/7/2012	12:51:11 PM	BCl3 valve closed
12/7/2012	12:51:11 PM	PH3 valve closed
12/7/2012	12:51:11 PM	SiCl4 pre valve closed
12/7/2012	12:51:11 PM	SiCl4 post valve closed
12/7/2012	12:51:11 PM	Main Vac valve closed
12/7/2012	12:51:11 PM	Bypass valve closed
12/7/2012	12:51:11 PM	Bubbler valve closed
12/7/2012	12:51:11 PM	Helium MFC set to  0.000000
12/7/2012	12:51:11 PM	H2 MFC set to  0.000000
12/7/2012	12:51:11 PM	BCl3 MFC set to  0.000000
12/7/2012	12:51:11 PM	PH3 MFC set to  0.000000
12/7/2012	12:51:11 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:51:11 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:51:11 PM	Tube furnace set to 0
12/7/2012	12:51:14 PM	H2 valve closed
12/7/2012	12:51:14 PM	BCl3 valve closed
12/7/2012	12:51:14 PM	PH3 valve closed
12/7/2012	12:51:14 PM	SiCl4 pre valve closed
12/7/2012	12:51:14 PM	SiCl4 post valve closed
12/7/2012	12:51:14 PM	Main Vac valve closed
12/7/2012	12:51:14 PM	Bypass valve closed
12/7/2012	12:51:14 PM	Bubbler valve closed
12/7/2012	12:51:14 PM	Helium valve opened
12/7/2012	12:51:14 PM	Helium MFC set to  500.000000
12/7/2012	12:51:14 PM	H2 MFC set to  0.000000
12/7/2012	12:51:14 PM	BCl3 MFC set to  0.000000
12/7/2012	12:51:14 PM	PH3 MFC set to  0.000000
12/7/2012	12:51:14 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:51:14 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:51:15 PM	Tube furnace set to 0
12/7/2012	12:51:16 PM	Helium valve closed
12/7/2012	12:51:16 PM	H2 valve closed
12/7/2012	12:51:16 PM	BCl3 valve closed
12/7/2012	12:51:16 PM	PH3 valve closed
12/7/2012	12:51:16 PM	SiCl4 pre valve closed
12/7/2012	12:51:16 PM	SiCl4 post valve closed
12/7/2012	12:51:16 PM	Main Vac valve closed
12/7/2012	12:51:16 PM	Bypass valve closed
12/7/2012	12:51:16 PM	Bubbler valve closed
12/7/2012	12:51:16 PM	Helium MFC set to  0.000000
12/7/2012	12:51:16 PM	H2 MFC set to  0.000000
12/7/2012	12:51:16 PM	BCl3 MFC set to  0.000000
12/7/2012	12:51:16 PM	PH3 MFC set to  0.000000
12/7/2012	12:51:16 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:51:16 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:51:16 PM	Tube furnace set to 0
12/7/2012	12:51:17 PM	Run finished at 12:51 PM
12/7/2012	12:51:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	12:58:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	12:58:55 PM	Recipe started at 12:58 PM
12/7/2012	12:58:55 PM	Helium valve closed
12/7/2012	12:58:55 PM	H2 valve closed
12/7/2012	12:58:55 PM	BCl3 valve closed
12/7/2012	12:58:55 PM	PH3 valve closed
12/7/2012	12:58:55 PM	SiCl4 pre valve closed
12/7/2012	12:58:55 PM	SiCl4 post valve closed
12/7/2012	12:58:55 PM	Main Vac valve closed
12/7/2012	12:58:55 PM	Bubbler valve closed
12/7/2012	12:58:55 PM	Bypass valve opened
12/7/2012	12:58:55 PM	Helium MFC set to  0.000000
12/7/2012	12:58:55 PM	H2 MFC set to  0.000000
12/7/2012	12:58:55 PM	BCl3 MFC set to  0.000000
12/7/2012	12:58:55 PM	PH3 MFC set to  0.000000
12/7/2012	12:58:55 PM	SiCl4 MFC set to  0.000000
12/7/2012	12:58:55 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	12:58:55 PM	Tube furnace set to 0
12/7/2012	1:00:28 PM	Helium valve closed
12/7/2012	1:00:28 PM	H2 valve closed
12/7/2012	1:00:28 PM	BCl3 valve closed
12/7/2012	1:00:28 PM	PH3 valve closed
12/7/2012	1:00:28 PM	SiCl4 pre valve closed
12/7/2012	1:00:28 PM	SiCl4 post valve closed
12/7/2012	1:00:28 PM	Main Vac valve closed
12/7/2012	1:00:28 PM	Bubbler valve closed
12/7/2012	1:00:28 PM	Bypass valve opened
12/7/2012	1:00:28 PM	Helium MFC set to  0.000000
12/7/2012	1:00:28 PM	H2 MFC set to  0.000000
12/7/2012	1:00:28 PM	BCl3 MFC set to  0.000000
12/7/2012	1:00:28 PM	PH3 MFC set to  0.000000
12/7/2012	1:00:28 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:00:28 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:00:28 PM	Tube furnace set to 0
12/7/2012	1:01:06 PM	Helium valve closed
12/7/2012	1:01:06 PM	H2 valve closed
12/7/2012	1:01:06 PM	BCl3 valve closed
12/7/2012	1:01:06 PM	PH3 valve closed
12/7/2012	1:01:06 PM	SiCl4 pre valve closed
12/7/2012	1:01:06 PM	SiCl4 post valve closed
12/7/2012	1:01:06 PM	Bypass valve closed
12/7/2012	1:01:06 PM	Bubbler valve closed
12/7/2012	1:01:06 PM	Main Vac valve opened
12/7/2012	1:01:06 PM	Helium MFC set to  0.000000
12/7/2012	1:01:06 PM	H2 MFC set to  0.000000
12/7/2012	1:01:06 PM	BCl3 MFC set to  0.000000
12/7/2012	1:01:06 PM	PH3 MFC set to  0.000000
12/7/2012	1:01:06 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:01:06 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:01:06 PM	Tube furnace set to 0
12/7/2012	1:01:07 PM	Run finished at 1:01 PM
12/7/2012	1:01:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	1:01:12 PM	Tube furnace set to 150
12/7/2012	1:54:05 PM	Main Vac valve closed
12/7/2012	1:54:15 PM	Main Vac valve opened
12/7/2012	1:54:31 PM	Recipe started at 1:54 PM
12/7/2012	1:54:31 PM	Helium valve closed
12/7/2012	1:54:31 PM	H2 valve closed
12/7/2012	1:54:31 PM	BCl3 valve closed
12/7/2012	1:54:31 PM	PH3 valve closed
12/7/2012	1:54:31 PM	SiCl4 pre valve closed
12/7/2012	1:54:31 PM	SiCl4 post valve closed
12/7/2012	1:54:31 PM	Main Vac valve closed
12/7/2012	1:54:31 PM	Bypass valve closed
12/7/2012	1:54:31 PM	Bubbler valve closed
12/7/2012	1:54:31 PM	Helium MFC set to  0.000000
12/7/2012	1:54:31 PM	H2 MFC set to  0.000000
12/7/2012	1:54:31 PM	BCl3 MFC set to  0.000000
12/7/2012	1:54:31 PM	PH3 MFC set to  0.000000
12/7/2012	1:54:31 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:54:31 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:54:31 PM	Tube furnace set to 0
12/7/2012	1:54:34 PM	Helium valve closed
12/7/2012	1:54:34 PM	BCl3 valve closed
12/7/2012	1:54:34 PM	PH3 valve closed
12/7/2012	1:54:34 PM	SiCl4 pre valve closed
12/7/2012	1:54:34 PM	SiCl4 post valve closed
12/7/2012	1:54:34 PM	Main Vac valve closed
12/7/2012	1:54:34 PM	Bypass valve closed
12/7/2012	1:54:34 PM	Bubbler valve closed
12/7/2012	1:54:34 PM	H2 valve opened
12/7/2012	1:54:34 PM	Helium MFC set to  0.000000
12/7/2012	1:54:34 PM	H2 MFC set to  500.000000
12/7/2012	1:54:34 PM	BCl3 MFC set to  0.000000
12/7/2012	1:54:34 PM	PH3 MFC set to  0.000000
12/7/2012	1:54:34 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:54:34 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:54:35 PM	Tube furnace set to 0
12/7/2012	1:55:47 PM	Helium valve closed
12/7/2012	1:55:47 PM	BCl3 valve closed
12/7/2012	1:55:47 PM	PH3 valve closed
12/7/2012	1:55:47 PM	SiCl4 pre valve closed
12/7/2012	1:55:47 PM	SiCl4 post valve closed
12/7/2012	1:55:47 PM	Main Vac valve closed
12/7/2012	1:55:47 PM	Bypass valve closed
12/7/2012	1:55:47 PM	H2 valve opened
12/7/2012	1:55:47 PM	Bubbler valve opened
12/7/2012	1:55:47 PM	Helium MFC set to  0.000000
12/7/2012	1:55:47 PM	H2 MFC set to  500.000000
12/7/2012	1:55:47 PM	BCl3 MFC set to  0.000000
12/7/2012	1:55:47 PM	PH3 MFC set to  0.000000
12/7/2012	1:55:47 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:55:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:55:47 PM	Tube furnace set to 0
12/7/2012	1:55:48 PM	Helium valve closed
12/7/2012	1:55:48 PM	BCl3 valve closed
12/7/2012	1:55:48 PM	PH3 valve closed
12/7/2012	1:55:48 PM	SiCl4 pre valve closed
12/7/2012	1:55:48 PM	SiCl4 post valve closed
12/7/2012	1:55:48 PM	Main Vac valve closed
12/7/2012	1:55:48 PM	Bypass valve closed
12/7/2012	1:55:48 PM	H2 valve opened
12/7/2012	1:55:48 PM	Bubbler valve opened
12/7/2012	1:55:48 PM	Helium MFC set to  0.000000
12/7/2012	1:55:48 PM	H2 MFC set to  500.000000
12/7/2012	1:55:48 PM	BCl3 MFC set to  0.000000
12/7/2012	1:55:48 PM	PH3 MFC set to  0.000000
12/7/2012	1:55:48 PM	SiCl4 MFC set to  0.000000
12/7/2012	1:55:48 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	1:55:48 PM	Tube furnace set to 1000
12/7/2012	2:05:48 PM	Helium valve closed
12/7/2012	2:05:48 PM	PH3 valve closed
12/7/2012	2:05:48 PM	Main Vac valve closed
12/7/2012	2:05:48 PM	Bypass valve closed
12/7/2012	2:05:48 PM	H2 valve opened
12/7/2012	2:05:48 PM	BCl3 valve opened
12/7/2012	2:05:48 PM	SiCl4 pre valve opened
12/7/2012	2:05:48 PM	SiCl4 post valve opened
12/7/2012	2:05:48 PM	Bubbler valve opened
12/7/2012	2:05:48 PM	Helium MFC set to  0.000000
12/7/2012	2:05:48 PM	H2 MFC set to  450.000000
12/7/2012	2:05:48 PM	BCl3 MFC set to  1.300000
12/7/2012	2:05:48 PM	PH3 MFC set to  0.000000
12/7/2012	2:05:48 PM	SiCl4 MFC set to  50.000000
12/7/2012	2:05:48 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:05:49 PM	Tube furnace set to 1000
12/7/2012	2:25:49 PM	Helium valve closed
12/7/2012	2:25:49 PM	BCl3 valve closed
12/7/2012	2:25:49 PM	PH3 valve closed
12/7/2012	2:25:49 PM	SiCl4 pre valve closed
12/7/2012	2:25:49 PM	SiCl4 post valve closed
12/7/2012	2:25:49 PM	Main Vac valve closed
12/7/2012	2:25:49 PM	Bypass valve closed
12/7/2012	2:25:49 PM	H2 valve opened
12/7/2012	2:25:49 PM	Bubbler valve opened
12/7/2012	2:25:49 PM	Helium MFC set to  0.000000
12/7/2012	2:25:49 PM	H2 MFC set to  500.000000
12/7/2012	2:25:49 PM	BCl3 MFC set to  0.000000
12/7/2012	2:25:49 PM	PH3 MFC set to  0.000000
12/7/2012	2:25:49 PM	SiCl4 MFC set to  0.000000
12/7/2012	2:25:49 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:25:49 PM	Tube furnace set to 900
12/7/2012	2:30:49 PM	Helium valve closed
12/7/2012	2:30:49 PM	BCl3 valve closed
12/7/2012	2:30:49 PM	PH3 valve closed
12/7/2012	2:30:49 PM	SiCl4 pre valve closed
12/7/2012	2:30:49 PM	SiCl4 post valve closed
12/7/2012	2:30:49 PM	Main Vac valve closed
12/7/2012	2:30:49 PM	Bypass valve closed
12/7/2012	2:30:49 PM	H2 valve opened
12/7/2012	2:30:49 PM	Bubbler valve opened
12/7/2012	2:30:49 PM	Helium MFC set to  0.000000
12/7/2012	2:30:49 PM	H2 MFC set to  500.000000
12/7/2012	2:30:49 PM	BCl3 MFC set to  0.000000
12/7/2012	2:30:49 PM	PH3 MFC set to  0.000000
12/7/2012	2:30:49 PM	SiCl4 MFC set to  0.000000
12/7/2012	2:30:49 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:30:49 PM	Tube furnace set to 800
12/7/2012	2:35:49 PM	Helium valve closed
12/7/2012	2:35:49 PM	BCl3 valve closed
12/7/2012	2:35:49 PM	PH3 valve closed
12/7/2012	2:35:49 PM	SiCl4 pre valve closed
12/7/2012	2:35:49 PM	SiCl4 post valve closed
12/7/2012	2:35:49 PM	Main Vac valve closed
12/7/2012	2:35:49 PM	Bypass valve closed
12/7/2012	2:35:49 PM	H2 valve opened
12/7/2012	2:35:49 PM	Bubbler valve opened
12/7/2012	2:35:49 PM	Helium MFC set to  0.000000
12/7/2012	2:35:49 PM	H2 MFC set to  500.000000
12/7/2012	2:35:49 PM	BCl3 MFC set to  0.000000
12/7/2012	2:35:49 PM	PH3 MFC set to  0.000000
12/7/2012	2:35:49 PM	SiCl4 MFC set to  0.000000
12/7/2012	2:35:49 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:35:49 PM	Tube furnace set to 700
12/7/2012	2:40:49 PM	Helium valve closed
12/7/2012	2:40:49 PM	BCl3 valve closed
12/7/2012	2:40:49 PM	PH3 valve closed
12/7/2012	2:40:49 PM	SiCl4 pre valve closed
12/7/2012	2:40:49 PM	SiCl4 post valve closed
12/7/2012	2:40:49 PM	Main Vac valve closed
12/7/2012	2:40:49 PM	Bypass valve closed
12/7/2012	2:40:49 PM	H2 valve opened
12/7/2012	2:40:49 PM	Bubbler valve opened
12/7/2012	2:40:49 PM	Helium MFC set to  0.000000
12/7/2012	2:40:49 PM	H2 MFC set to  500.000000
12/7/2012	2:40:49 PM	BCl3 MFC set to  0.000000
12/7/2012	2:40:49 PM	PH3 MFC set to  0.000000
12/7/2012	2:40:49 PM	SiCl4 MFC set to  0.000000
12/7/2012	2:40:49 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:40:50 PM	Tube furnace set to 600
12/7/2012	2:45:50 PM	H2 valve closed
12/7/2012	2:45:50 PM	BCl3 valve closed
12/7/2012	2:45:50 PM	PH3 valve closed
12/7/2012	2:45:50 PM	SiCl4 pre valve closed
12/7/2012	2:45:50 PM	SiCl4 post valve closed
12/7/2012	2:45:50 PM	Main Vac valve closed
12/7/2012	2:45:50 PM	Bypass valve closed
12/7/2012	2:45:50 PM	Helium valve opened
12/7/2012	2:45:50 PM	Bubbler valve opened
12/7/2012	2:45:50 PM	Helium MFC set to  500.000000
12/7/2012	2:45:50 PM	H2 MFC set to  0.000000
12/7/2012	2:45:50 PM	BCl3 MFC set to  0.000000
12/7/2012	2:45:50 PM	PH3 MFC set to  0.000000
12/7/2012	2:45:50 PM	SiCl4 MFC set to  0.000000
12/7/2012	2:45:50 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	2:45:50 PM	Tube furnace set to 0
12/7/2012	3:05:50 PM	Helium valve closed
12/7/2012	3:05:50 PM	H2 valve closed
12/7/2012	3:05:50 PM	BCl3 valve closed
12/7/2012	3:05:50 PM	PH3 valve closed
12/7/2012	3:05:50 PM	SiCl4 pre valve closed
12/7/2012	3:05:50 PM	SiCl4 post valve closed
12/7/2012	3:05:50 PM	Main Vac valve closed
12/7/2012	3:05:50 PM	Bypass valve closed
12/7/2012	3:05:50 PM	Bubbler valve closed
12/7/2012	3:05:50 PM	Helium MFC set to  0.000000
12/7/2012	3:05:50 PM	H2 MFC set to  0.000000
12/7/2012	3:05:50 PM	BCl3 MFC set to  0.000000
12/7/2012	3:05:50 PM	PH3 MFC set to  0.000000
12/7/2012	3:05:50 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:05:50 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:05:50 PM	Tube furnace set to 0
12/7/2012	3:05:51 PM	Run finished at 3:05 PM
12/7/2012	3:37:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	3:37:55 PM	Recipe started at 3:37 PM
12/7/2012	3:37:55 PM	Helium valve closed
12/7/2012	3:37:55 PM	H2 valve closed
12/7/2012	3:37:55 PM	BCl3 valve closed
12/7/2012	3:37:55 PM	PH3 valve closed
12/7/2012	3:37:55 PM	SiCl4 pre valve closed
12/7/2012	3:37:55 PM	SiCl4 post valve closed
12/7/2012	3:37:55 PM	Main Vac valve closed
12/7/2012	3:37:55 PM	Bypass valve closed
12/7/2012	3:37:55 PM	Bubbler valve closed
12/7/2012	3:37:55 PM	Helium MFC set to  0.000000
12/7/2012	3:37:55 PM	H2 MFC set to  0.000000
12/7/2012	3:37:55 PM	BCl3 MFC set to  0.000000
12/7/2012	3:37:55 PM	PH3 MFC set to  0.000000
12/7/2012	3:37:55 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:37:55 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:37:55 PM	Tube furnace set to 0
12/7/2012	3:37:58 PM	H2 valve closed
12/7/2012	3:37:58 PM	BCl3 valve closed
12/7/2012	3:37:58 PM	PH3 valve closed
12/7/2012	3:37:58 PM	SiCl4 pre valve closed
12/7/2012	3:37:58 PM	SiCl4 post valve closed
12/7/2012	3:37:58 PM	Main Vac valve closed
12/7/2012	3:37:58 PM	Bypass valve closed
12/7/2012	3:37:58 PM	Bubbler valve closed
12/7/2012	3:37:58 PM	Helium valve opened
12/7/2012	3:37:58 PM	Helium MFC set to  500.000000
12/7/2012	3:37:58 PM	H2 MFC set to  0.000000
12/7/2012	3:37:58 PM	BCl3 MFC set to  0.000000
12/7/2012	3:37:58 PM	PH3 MFC set to  0.000000
12/7/2012	3:37:58 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:37:58 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:37:59 PM	Tube furnace set to 0
12/7/2012	3:38:02 PM	Helium valve closed
12/7/2012	3:38:02 PM	H2 valve closed
12/7/2012	3:38:02 PM	BCl3 valve closed
12/7/2012	3:38:02 PM	PH3 valve closed
12/7/2012	3:38:02 PM	SiCl4 pre valve closed
12/7/2012	3:38:02 PM	SiCl4 post valve closed
12/7/2012	3:38:02 PM	Main Vac valve closed
12/7/2012	3:38:02 PM	Bypass valve closed
12/7/2012	3:38:02 PM	Bubbler valve closed
12/7/2012	3:38:02 PM	Helium MFC set to  0.000000
12/7/2012	3:38:02 PM	H2 MFC set to  0.000000
12/7/2012	3:38:02 PM	BCl3 MFC set to  0.000000
12/7/2012	3:38:02 PM	PH3 MFC set to  0.000000
12/7/2012	3:38:02 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:38:02 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:38:03 PM	Tube furnace set to 0
12/7/2012	3:38:04 PM	Run finished at 3:38 PM
12/7/2012	3:38:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/7/2012	3:41:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	3:41:28 PM	Recipe started at 3:41 PM
12/7/2012	3:41:28 PM	Helium valve closed
12/7/2012	3:41:28 PM	H2 valve closed
12/7/2012	3:41:28 PM	BCl3 valve closed
12/7/2012	3:41:28 PM	PH3 valve closed
12/7/2012	3:41:28 PM	SiCl4 pre valve closed
12/7/2012	3:41:28 PM	SiCl4 post valve closed
12/7/2012	3:41:28 PM	Main Vac valve closed
12/7/2012	3:41:28 PM	Bubbler valve closed
12/7/2012	3:41:28 PM	Bypass valve opened
12/7/2012	3:41:28 PM	Helium MFC set to  0.000000
12/7/2012	3:41:28 PM	H2 MFC set to  0.000000
12/7/2012	3:41:28 PM	BCl3 MFC set to  0.000000
12/7/2012	3:41:28 PM	PH3 MFC set to  0.000000
12/7/2012	3:41:28 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:41:28 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:41:28 PM	Tube furnace set to 0
12/7/2012	3:42:47 PM	Helium valve closed
12/7/2012	3:42:47 PM	H2 valve closed
12/7/2012	3:42:47 PM	BCl3 valve closed
12/7/2012	3:42:47 PM	PH3 valve closed
12/7/2012	3:42:47 PM	SiCl4 pre valve closed
12/7/2012	3:42:47 PM	SiCl4 post valve closed
12/7/2012	3:42:47 PM	Main Vac valve closed
12/7/2012	3:42:47 PM	Bubbler valve closed
12/7/2012	3:42:47 PM	Bypass valve opened
12/7/2012	3:42:47 PM	Helium MFC set to  0.000000
12/7/2012	3:42:47 PM	H2 MFC set to  0.000000
12/7/2012	3:42:47 PM	BCl3 MFC set to  0.000000
12/7/2012	3:42:47 PM	PH3 MFC set to  0.000000
12/7/2012	3:42:47 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:42:47 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	3:42:47 PM	Tube furnace set to 0
12/7/2012	3:43:35 PM	Run aborted at 3:43 PM
12/7/2012	3:43:35 PM	Helium valve closed
12/7/2012	3:43:35 PM	H2 valve closed
12/7/2012	3:43:35 PM	BCl3 valve closed
12/7/2012	3:43:35 PM	PH3 valve closed
12/7/2012	3:43:35 PM	SiCl4 pre valve closed
12/7/2012	3:43:35 PM	SiCl4 post valve closed
12/7/2012	3:43:35 PM	Bypass valve closed
12/7/2012	3:43:35 PM	Main Vac valve closed
12/7/2012	3:43:35 PM	Bubbler valve closed
12/7/2012	3:43:35 PM	Helium MFC set to  0.000000
12/7/2012	3:43:35 PM	H2 MFC set to  0.000000
12/7/2012	3:43:35 PM	BCl3 MFC set to  0.000000
12/7/2012	3:43:35 PM	PH3 MFC set to  0.000000
12/7/2012	3:43:35 PM	SiCl4 MFC set to  0.000000
12/7/2012	3:43:35 PM	Tube furnace set to 0
12/7/2012	3:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/7/2012	3:43:40 PM	Tube furnace set to 150
12/7/2012	3:43:45 PM	Main Vac valve opened
12/7/2012	4:10:53 PM	Recipe started at 4:10 PM
12/7/2012	4:10:53 PM	Helium valve closed
12/7/2012	4:10:53 PM	H2 valve closed
12/7/2012	4:10:53 PM	BCl3 valve closed
12/7/2012	4:10:53 PM	PH3 valve closed
12/7/2012	4:10:53 PM	SiCl4 pre valve closed
12/7/2012	4:10:53 PM	SiCl4 post valve closed
12/7/2012	4:10:53 PM	Bypass valve closed
12/7/2012	4:10:53 PM	Bubbler valve closed
12/7/2012	4:10:53 PM	Main Vac valve opened
12/7/2012	4:10:53 PM	Helium MFC set to  0.000000
12/7/2012	4:10:53 PM	H2 MFC set to  0.000000
12/7/2012	4:10:53 PM	BCl3 MFC set to  0.000000
12/7/2012	4:10:53 PM	PH3 MFC set to  0.000000
12/7/2012	4:10:53 PM	SiCl4 MFC set to  0.000000
12/7/2012	4:10:53 PM	Bypass solenoid MFC set to  0.000000
12/7/2012	4:10:53 PM	Tube furnace set to 150
